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1

Pixel-Based Absolute Topography Test for Three Flats

Parks, Robert E., Shao, Lianzhen, Evans, Chris J.

Journal:

Year:

1998

Language:

english

File:

PDF, 2.46 MB

english, 1998

2

Test of a slow off-axis parabola at its center of curvature

Parks, Robert E., Evans, Chris J., Shao, Lianzhen

Journal:

Year:

1995

Language:

english

File:

PDF, 198 KB

english, 1995

3

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Metrology, Inspection, and Process Control for Microlithography XV - Haidinger interferometer for silicon wafer TTV measurement

Parks, Robert E., Shao, Lianzhen, Davies, Angela D., Evans, Christopher J., Sullivan, Neal T.

Year:

2001

Language:

english

File:

PDF, 662 KB

english, 2001

4

SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Metrology, Inspection, and Process Control for Microlithography XV - Interferometric testing of photomask substrate flatness

Evans, Christopher J., Parks, Robert E., Shao, Lianzhen, Schmitz, Tony L., Davies, Angela D., Sullivan, Neal T.

Year:

2001

Language:

english

File:

PDF, 1.95 MB

english, 2001

5

SPIE Proceedings [SPIE Optical Instrumentation & Systems Design - Glasgow, United Kingdom (Sunday 12 May 1996)] Specification, Production, and Testing of Optical Components and Systems - Stitching of equatorial profiles for extended spatial range assessment

Sullivan, Paul J., Parks, Robert E., Shao, Lianzhen, Gee, Anthony E., Houee, Jean-Francois

Year:

1996

Language:

english

File:

PDF, 222 KB

english, 1996

6

SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Surface Characterization and Testing - Intensity Distribution In Out-Of-Focus Images Of A Rotationally Symmetric Optical System

Wong, Steve N., Parks, Robert E., Shao, Lianzhen, Creath, Katherine

Year:

1987

Language:

english

File:

PDF, 1.49 MB

english, 1987

7

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Interferometry: Surface Characterization and Testing - Absolute testing of flats using four data sets

Shao, Lianzhen, Parks, Robert E., Ai, Chiayu, Creath, Katherine, Greivenkamp, John E.

Year:

1992

Language:

english

File:

PDF, 303 KB

english, 1992

8

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Optical Manufacturing and Testing II - Measurements of the LIGO Pathfinder optics

Parks, Robert E., Evans, Christopher J., Sullivan, Paul J., Shao, Lianzhen, Loucks, Bryan E., Stahl, H. Philip

Year:

1997

Language:

english

File:

PDF, 749 KB

english, 1997

9

SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] Advanced Optical Manufacturing and Testing - Three-dimensional contouring on a numerically controlled grinder

Ketelsen, Dean A., Kittrell, W. C., Parks, Robert E., Shao, Lianzhen, Sanger, Gregory M., Reid, Paul B., Baker, Lionel R.

Year:

1990

Language:

english

File:

PDF, 397 KB

english, 1990

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